Codes et normes - Achat
ISO 14606:2022
Surface chemical analysis — Sputter depth profiling — Optimization using layered systems as reference materials
SKU: iso_083238_180395
Publié par ISO
Année de publication 2022
3 Edition
17 pages
détails du produit
This document gives guidance and requirements on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials, in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry.
This document is not intended to cover the use of special multilayered systems such as delta doped layers.
This document is not intended to cover the use of special multilayered systems such as delta doped layers.