Codes & Standards - Purchase
ISO 14644-12:2018
Cleanrooms and associated controlled environments -- Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
SKU: iso_069432_163766
Published by ISO
Publication Year 2018
1 Edition
11 pages
Product Details
This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.
For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less ? nanoscale ? are considered.
The monitoring given in this document is for use mainly in operational states.
NOTE 1 For the purposes of this document, reference is made to nanoscale particles, which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.
NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc.
NOTE 3 Health and safety considerations are excluded from this document.
