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ISO 14644-12:2018

Cleanrooms and associated controlled environments -- Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration

SKU: iso_069432_163766 Published by ISO Publication Year 2018 1 Edition 11 pages

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This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles. For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less ? nanoscale ? are considered. The monitoring given in this document is for use mainly in operational states. NOTE 1 For the purposes of this document, reference is made to nanoscale particles, which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale. NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc. NOTE 3 Health and safety considerations are excluded from this document.

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GST REG No R119441681
QST REG No R1006017360

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