Codes & Standards - Purchase
ISO 25178-603:2013
Geometrical product specifications (GPS) -- Surface texture: Areal -- Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
SKU: iso_061236_155955
Published by ISO
Publication Year 2013
1 Edition
28 pages
Product Details
ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.