IEC 62047-28:2017
Semiconductor devices - Micro-electromechanical devices - Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices
Product Details
This document applies to vibration driven electret energy harvesting devices whose electrodes with a gap below 1 000 µm are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography or deposition.