Codes & Standards - Purchase
IEC 62047-32:2019
Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators
SKU: iec_029696_105465
Published by IEC
Publication Year 2019
1.0 Edition
37 pages
Product Details
IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.