Codes & Standards - Purchase
SKU: iso_085556_186434
Published by ISO
Publication Year 2024
2 Edition
24 pages
This document specifies a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy. This method applies to surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, Rsm, in the range of about 0,04 µm to 2,5 µm.
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