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ISO 18115-3:2022
Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis
SKU: iso_076357_179220
Published by ISO
Publication Year 2022
1 Edition
35 pages
Product Details
This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.