Codes & Standards - Purchase
ISO/TS 25138:2019
Surface chemical analysis -- Analysis of metal oxide films by glow-discharge optical-emission spectrometry
SKU: iso_074823_170351
Published by ISO
Publication Year 2019
2 Edition
40 pages
Product Details
This document describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.
This method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.