ISO 20486:2017
Non-destructive testing — Leak testing — Calibration of reference leaks for gases
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The comparison procedures are preferably applicable to helium leaks, because this test gas can be selectively measured by a mass spectrometer leak detector (MSLD) (the definition of MSLD is given in ISO 20484).
Calibration by comparison (see methods A, As, B and Bs below) with known reference leaks is easily possible for leaks with reservoir and leakage rates below 10-7 Pa·m3/s.
Figure 1 gives an overview of the different recommended calibration methods.