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ISO 11952:2019

Surface chemical analysis -- Scanning-probe microscopy -- Determination of geometric quantities using SPM: Calibration of measuring systems

SKU: iso_067552_169431 Published by ISO Publication Year 2019 2 Edition 58 pages

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This document specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required. This document has the following objectives: -- to increase the comparability of measurements of geometrical quantities made using SPMs by traceability to the unit of length; -- to define the minimum requirements for the calibration process and the conditions of acceptance; -- to ascertain the instrument's ability to be calibrated (assignment of a calibrate-ability category to the instrument); -- to define the scope of the calibration (conditions of measurement and environments, ranges of measurement, temporal stability, transferability); -- to provide a model, in accordance with ISO/IEC Guide 98-3, to calculate the uncertainty for simple geometrical quantities in measurements using an SPM; -- to define the requirements for reporting results.

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GST REG No R119441681
QST REG No R1006017360

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ISO 11952:2019

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