Codes & Standards - Purchase
ISO 13424:2013
Surface chemical analysis -- X-ray photoelectron spectroscopy -- Reporting of results of thin-film analysis
SKU: iso_053773_153841
Published by ISO
Publication Year 2013
1 Edition
46 pages
Product Details
ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.