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ISO 13083:2015
Surface chemical analysis -- Scanning probe microscopy -- Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
SKU: iso_052691_155122
Published by ISO
Publication Year 2015
1 Edition
14 pages
Product Details
ISO 13083:2015 describes a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices. The method involves the use of a sharp-edged artefact.