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    • IEC 62047-44:2024
    Codes & Standards - Purchase

    IEC 62047-44:2024

    Semiconductor devices - Micro-electromechanical devices - Part 44: Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices

    SKU: iec_072687_114896 Published by IEC Publication Year 2024 1 Edition 19 pages

    Product Details

    • Overview
    IEC 62047-44:2024 describes terminology, definitions and test methods that are used to evaluate and determine the dynamic performance of MEMS (Micro-Electromechanical Systems) resonant electric‑field‑sensitive devices. It also specifies sample requirements and test equipment for dynamic performances of MEMS resonant electric‑field‑sensitive devices. The statements made in this document are also applicable to MEMS resonant electric‑field‑sensitive devices with various driving mechanisms such as electrostatic, electrothermal, electromagnetic, piezoelectric, etc.

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    GST REG No R119441681
    QST REG No R1006017360

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