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IEC TR 63258:2021
Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films
SKU: iec_059663_109907
Published by IEC
Publication Year 2021
1.0 Edition
21 pages
Product Details
IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.
