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IEC 62047-1:2016
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
SKU: iec_023992_052359
Published by IEC
Publication Year 2016
2.0 Edition
66 pages
Product Details
IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices.
This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.