Microbeam analysis — Hyper-dimensional data file specification (HMSA)

Microbeam analysis — Electron probe microanalysis — Guidelines for the specification of certified reference materials (CRMs)

Microbeam analysis — EMSA/MAS standard file format for spectral-data exchange

Microbeam analysis — Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)

Microbeam analysis — Methods of specimen preparation for analysis of general powders using WDS and EDS

Microbeam analysis -- Electron probe microanalysis -- Quantitative point analysis for bulk specimens using wavelength dispersive X-ray spectroscopy

Microbeam analysis -- Electron probe microanalysis -- Guidelines for qualitative point analysis by wavelength dispersive X-ray spectrometry

Microbeam analysis -- Electron probe microanalysis (EPMA) -- Vocabulary

Microbeam analysis -- Quantitative analysis using energy-dispersive spectrometry (EDS) for elements with an atomic number of 11 (Na) or above