ISO 29301:2023
Microbeam analysis — Analytical electron microscopy — Methods for calibrating image magnification by using reference materials with periodic structures
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This document is applicable to the magnification of the TEM image recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera. This document also refers to the calibration of a scale bar.
This document does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM).